Beyond Measure

Solutions

We develop, design, and manufacture custom fiber optic temperature and position measuring subsystems used in the Global Wafer, OLED Fabrication Equipment and related industries. We offer:

• Contact & Immersion Temperature Probes
• Temperature Converters
• Fiber Optic-based Wafer Position Sensors

Technologies

Our temperature sensing solutions utilize proprietary fiber optic sensing technology. We offer competitive solutions for our customers where accuracy, speed, and quality are critical to their business.

Applications

The Semiconductor industry mandates precise quality and uniform control over temperature and wafer handling. Our solutions are integrated into Wafer and OLED fabrication equipment in these specialties:

• Temperature measurement in RF plasma enhanced etch
  During wafer fabrication in dielectric etch, temperatures within the electrostatic chuck are carefully maintained and monitored for complete stability.
• Positioning sensing of wafer handling in all semiconductor processes
  At any step during wafer fabrication, high-accuracy position sensors are critical for wafer handling to and from the fab equipment.
• Flat Panel Display
  Etch and Deposition in OLED manufacturing process applications rely on fiber optic temperature sensors for precise process control in high RF (radio frequency) environments.

Advantages

We deliver value added solutions providing an edge over our competitors in these areas:

• High accuracy
• Rapid prototyping
• Radio Frequency (RF) immunity
• Rapid New Product Introduction
• Customized “plug and play” solutions
• Exceptional reliability