Solutions

Contact & Immersion Temperature Probes

Photon Control specializes in rapid prototyping and manufacturing of custom OEM solutions for contact and immersion optical temperature sensing specialized for dielectric and conductor etch applications.

Contact Probe

Specifications Capability
Standard Range -95°C to 400°C (wider temperature range available)
Measurement Accuracy Up to ±0.05°C
Thermal Response Rate Up to 100°C/s
Mounting Custom

Customized contact probes available.

Immersion Probe

Specifications Capability
Standard Range -95°C to 200°C (wider temperature range available)
Measurement Accuracy Up to ±0.05°C
Standard Length 2m and 5m (custom lengths are available)
Extension Length Custom
Bend Radius Min. 5mm
Looking for a Customized Solution? Contact Us

Converters

Photon Control temperature converters are designed and developed specifically to meet the demanding and stringent requirements of high RF semiconductor process control applications.

Converter

Extension Cable

Probe

Specification Capability
Measurement Range -95°C to 450°C
Measurement Accuracy Up to ±0.05°C
Sampling Frequency 30 Hz
Measurement Resolution 0.01°C
Output Update Interval 100 ms
Operating Temperature -20°C to +60°C
Converter Analog Output 4-20 mA
Digital Output RS-232 RS-485
Power Supply Voltage 12 to 24 VDC
Compliance: Electrical safety: CAN/CSA-C22.2 No. 61010-1-04,
UL Std. No. 61010-1, IEC 61010-1-2001, IEC 62471:2006;
Photobiological safety: IEC 61326:2013, FCC Title 47 CFR Part 15, ICES- 003 Issue 6;
Manufacturing process: ISO 9001:2015

Multi-Channel Converter

The Multi-Channel system is a single electronic enclosure for 4 channels which reduces the space required for temperature sensing systems. Photon Control’s temperature converters supply the highest accuracy measurement to the industry over a broad operating range. These converters are designed and developed specifically to meet the demanding and stringent requirements of high RF semiconductor process control applications.

Converter

Extension Cable

Probe

Specification Capability
Number of Channels 4
Measurement Range -95°C to 450°C
Measurement Accuracy Up to ±0.05°C
Sampling Frequency 30 Hz
Measurement Resolution 0.01°C
Output Update Interval 50 ms
Operating Temperature -20°C to +60°C
Analog Output 4-20 mA and 0-10 VDC
Analog Output Resolution 16-bit
Digital Output USB, EtherCAT, RS-485
Power Supply Voltage 12-24 VDC
Compliance Manufacturing process: ISO 9001:2015

Electrical safety: CAN/CSA-C22 No. 61010-1-04*,
UL Std. No. 61010- 1*, IEC 61010-1-2001*,
iec 62471:2006*;
Photobiological safety: IEC 62471:2006*;
Electro-magnetic compliance: IEC 61326: 2013*,
FCC Title 47 CFR Part 15*, ICES-003 Issue 6
PENDING*

Position and Displacement Subsystems

We custom design, develop, and manufacture optical position and displacement sensors that can measure wafer/chuck edge and center locations with accuracies down to 10 μm.

Looking for a Customized Solution? Contact Us