PRODUCTS

PRODUCTS

FIBER OPTIC TEMPERATURE PROBES

Photon Control’s fiber optic temperature probes use the principal of phosphorescence to measure temperature very accurately in the harshest environments. Proprietary phosphor material at the tip of the probe is in close thermal contact with a solid surface (contact probe) or immersed in a gas or liquid (immersion probe), and the phosphor decay time is measured and converted to temperature.

Our expertise in phosphor materials and their application in temperature probes sets Photon Control apart from our competitors with respect to accuracy and long term stability in a real semi-conductor manufacturing environment.

Fiber Optic Temperature Probes

Immersion Probe

POSITION AND DISPLACEMENT SENSORS

We custom design, develop, and manufacture optical position and displacement sensors that can measure wafer/chuck edge and center locations with accuracies down ~ 25 µm.

Repeatable wafer position, leveling, and wafer placement in the process chamber is critical for achieving high yields making accuracy of the utmost importance.

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SINGLE CHANNEL TEMPERATURE SENSING PRODUCTS

The single channel converter is Photon’s baseline product, and is cost-effective for systems with up to three probes. With proprietary techniques for compensating for drifts in ambient temperature and intensity of the illumination source, this converter is extremely stable.

The combination of this converter and our fiber optic probes enable a stable temperature sensing system that customers can depend on to process their valuable wafers at the same temperature, wafer after wafer.

Technical Specifications
Maximum Number of Channels 1
Measurement Range -100°C to +450°C (depending on probe specifications)
Measurement Accuracy Standard: ±0.5°C (probe-converter interchangeable)
Advanced: ±0.1°C (probe a converter paired)
Electrical Interference Immune to EMI
Temperature Sampling Rate 30Hz
Measurement Resolution 0.01°C
I/O Analog:  4-20mA
Digital: RS-485, RS-232
Converter Dimensions 112 x 100 x 22.5 mm
Probe Design Standard and custom options available

MULTI-CHANNEL TEMPERATURE SENSING PRODUCTS

The Multi-channel temperature converter allows for the connection of up to five probes at once. The primary advantages of this product are, a drastic reduction in the cost per channel to our customers and a reduction in form factor for systems, both of which are advantages when there are 3 or more probes in a process chamber.

The multi-channel system features an option for Ether-CAT communication protocol and supports the need to measure more temperature points within the process chamber, which enables chipmakers to maintain or increase yield for advanced technology nodes.

Technical Specifications
Maximum Number of Channels 5
Measurement Range -100°C to +450°C (depending on probe specifications)
Measurement Accuracy Standard: ±0.5°C (probe-converter interchangeable)
Advanced: ±0.1°C (probe a converter paired)
Electrical Interference Immune to EMI
Temperature Sampling Rate 30Hz
Measurement Resolution 0.01°C
I/O Analog:  4-20mA
Digital: RS-485, RS-232  Option: EtherCAT capability
Converter Dimensions 112 x 100 x 22.5 mm
Probe Design Standard and custom options available

Looking for more information?